During creation each higher tattva is the cause of the next lower one, but the entire act of creation, which is the unfolding of the tattvas, is accomplished by the supreme Lord outside of time, with time itself manifesting at the level of one of the intermediate tattvas. Each higher tattva is relatively more subtle in nature than its next lower tattva, which is more gross and extrinsic. Also each higher tattva, as the cause of the next lower one, permeates and pervades it. Thus the &va tattva directly permeates the Sakti tattva, which pervades all the other ones. Thus each lower tattva draws its existence from the immediately higher tattva that is its material cause.
In some texts of monistic Saivism, including the ParamHrthasilra, the tattvas are divided into two domains (adhvas): the pure domain (Buddha adlwa) that extends from the Siva tattva down to the Suddha vidylt tathrn, and the impure domain (aSuddha adlwa) that extends from the milya tattva down to the final gross level of prthvt.